Comprehensive Review on High Hydrogen Permselectivity of Palladium Based Membranes: Part II
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چکیده
منابع مشابه
Microfabricated Palladium-based Membranes for Hydrogen Separation
An innovative process for the microfabrication of Pd-based membranes (Pd and Pd-Ag) on a <110> silicon wafer is presented. Pd-Ag alloy films containing 23wt% Ag are prepared by a dual-sputtering from pure Pd and Ag targets. In the first step, deep grooves are KOH etched in one side of a <110> oriented silicon wafer, leaving membranes with a thickness of ca. 50 μm. After Pd alloy deposition on t...
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ژورنال
عنوان ژورنال: Johnson Matthey Technology Review
سال: 2020
ISSN: 2056-5135
DOI: 10.1595/205651321x16019176538189